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Volumn 69, Issue 15, 1996, Pages 2264-2266

SiC rapid thermal carbonization of the (111)Si semiconductor-on-insulator structure and subsequent metalorganic chemical vapor deposition of GaN

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001257258     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117528     Document Type: Article
Times cited : (80)

References (14)
  • 7
    • 85033839563 scopus 로고    scopus 로고
    • IPEC Corp., Danbury, Connecticut
    • IPEC Corp., Danbury, Connecticut.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.