SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 694-706

The potential of the scanning probe microscopy for thin film characterization

(1) Oesterschulze, Egbert a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

Near field probes; Scanning force microscopy; Scanning probe microscopy

Indexed keywords

OPTICAL MICROSCOPY; PHOTODETECTORS; PROBES; SCHOTTKY BARRIER DIODES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL DIFFUSION IN SOLIDS; THERMOANALYSIS; THERMOCOUPLES; THIN FILMS;

SCANNING FORCE MICROSCOPY (SFM); SCANNING NEAR FIELD OPTICAL MICROSCOPY (SNOM); SCANNING PROBE MICROSCOPY; SCANNING THERMAL MICROSCOPY (STM);

SCANNING TUNNELING MICROSCOPY;

EID: 0031385221 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00287-9 Document Type: Article

Times cited : (8)

References (59)

1
- 0000006242
- G. Binnig, H. Rohrer, Helv. Phys. Acta 55 (1982) 726.
- (1982) Helv. Phys. Acta , vol.55 , pp. 726
- Binnig, G.¹ Rohrer, H.²

2
- 0012618901
- G. Binnig, C.F. Quate, C. Gerber, Phys. Rev. Lett. 56 (1986) 930-933.
- (1986) Phys. Rev. Lett. , vol.56 , pp. 930-933
- Binnig, G.¹ Quate, C.F.² Gerber, C.³

3
- 36549104784
- Y. Martin, D.W. Abraham, H.K. Wickramasinghe, Appl. Phys. Lett. 52 (13) (1988) 1103-1105.
- (1988) Appl. Phys. Lett. , vol.52 , Issue.13 , pp. 1103-1105
- Martin, Y.¹ Abraham, D.W.² Wickramasinghe, H.K.³

4
- 0000302691
- Y. Huang, C.C. Williams, Appl. Phys. Lett. 66 (3) (1995) 344-346.
- (1995) Appl. Phys. Lett. , vol.66 , Issue.3 , pp. 344-346
- Huang, Y.¹ Williams, C.C.²

5
- 0001352949
- Y. Huang, C.C. Williams, J. Vac. Sci. Technol. B 14 (1) (1996) 433-436.
- (1996) J. Vac. Sci. Technol. B , vol.14 , Issue.1 , pp. 433-436
- Huang, Y.¹ Williams, C.C.²

6
- 84927762517
- N.A. Burnham, R.J. Colton, J. Vac. Sci. Technol. A 7 (1989) 2906.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2906
- Burnham, N.A.¹ Colton, R.J.²

7
- 26044432476
- D. Rugar, H.J. Mamin, P. Guethner, Appl. Phys. Lett. 55 (1989) 2588.
- (1989) Appl. Phys. Lett. , vol.55 , pp. 2588
- Rugar, D.¹ Mamin, H.J.² Guethner, P.³

8
- 0347582944
- S.R. Cohen, Ultramicroscopy 66 (1992) 42-44.
- (1992) Ultramicroscopy , vol.66 , pp. 42-44
- Cohen, S.R.¹

9
- 0011095047
- C.C. Williams, H.K. Wickramasignhe, Appl. Phys. Lett. 49 (1986) 1587-1589.
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1587-1589
- Williams, C.C.¹ Wickramasignhe, H.K.²

10
- 0000926673
- A. Majumdar, J.P. Carrejo, J. Lai, M. Chandrachood, SPIE 1855 (1993) 209-217.
- (1993) SPIE , vol.1855 , pp. 209-217
- Majumdar, A.¹ Carrejo, J.P.² Lai, J.³ Chandrachood, M.⁴

11
- 0009264534
- R. Heiderhoff, P. Koschinski, M. Maywald, L.J. Balk, P.K. Backmann, Diamond Relat. Mater. 4 (1995) 645-651.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 645-651
- Heiderhoff, R.¹ Koschinski, P.² Maywald, M.³ Balk, L.J.⁴ Backmann, P.K.⁵

12
- 0021410769
- D.W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44 (1984) 651-653.
- (1984) Appl. Phys. Lett. , vol.44 , pp. 651-653
- Pohl, D.W.¹ Denk, W.² Lanz, M.³

13
- 84958486703
- E. Betzig, M. Isaacson, H. Barshatzky, A. Lewis, K. Lin, SPIE 897 (1988) 91-99.
- (1988) SPIE , vol.897 , pp. 91-99
- Betzig, E.¹ Isaacson, M.² Barshatzky, H.³ Lewis, A.⁴ Lin, K.⁵

14
- 0346321975
- Kluwer, Dordrecht
- D.W. Pohl, D. Courjon ( Eds.), Photon and Local Probes, Kluwer, Dordrecht, 1992.
- (1992) Photon and Local Probes
- Pohl, D.W.¹ Courjon, D.²

15
- 0011644815
- Kluwer, Dordrecht
- O. Marti, R. Möller (Eds.), Photon and Local Probes, Kluwer, Dordrecht, 1994.
- (1994) Photon and Local Probes
- Marti, O.¹ Möller, R.²

16
- 84953677225
- P. Grütter, E. Meyer, H. Heinzelmann, L. Rosenthaler, H.R. Hidber, H.J. Güntherodt, J. Vac. Sci. Technol. A6 (1988) 279.
- (1988) J. Vac. Sci. Technol. , vol.A6 , pp. 279
- Grütter, P.¹ Meyer, E.² Heinzelmann, H.³ Rosenthaler, L.⁴ Hidber, H.R.⁵ Güntherodt, H.J.⁶

17
- 0003635359
- Oxford University Press, New York
- D. Sarid, Scanning Force Microscopy, Oxford University Press, New York, 1991.
- (1991) Scanning Force Microscopy
- Sarid, D.¹

18
- 0003483292
- Cambridge University Press, Cambridge
- R. Wiesendanger, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, Cambridge, 1994.
- (1994) Scanning Probe Microscopy and Spectroscopy
- Wiesendanger, R.¹

19
- 0037869828
- B. Bhushan (Ed.), Micro/Nanotribology and its Applications, Kluwer Academic Publishers
- R. Kassing, E. Oesterschulze, in: B. Bhushan (Ed.), Micro/Nanotribology and its Applications, NATO ASI series, Vol. 330, Kluwer Academic Publishers, 1997, pp. 35-54.
- (1997) NATO ASI Series , vol.330 , pp. 35-54
- Kassing, R.¹ Oesterschulze, E.²

20
- 0002841766
- R. Wiesendanger, H.-J. Güntherodt (Eds.), Springer, Berlin
- D. Tomanek, in: R. Wiesendanger, H.-J. Güntherodt (Eds.), Scanning Tunneling Microscopy III, Springer, Berlin, 1993, pp. 267-292.
- (1993) Scanning Tunneling Microscopy III , pp. 267-292
- Tomanek, D.¹

21
- 84957350232
- I.L. Singer, J. Vac. Sci. Technol. A 12 (5) (1994) 2605.
- (1994) J. Vac. Sci. Technol. A , vol.12 , Issue.5 , pp. 2605
- Singer, I.L.¹

22
- 0001618503
- R.M. Overney, T. Bonner, E. Meyer, M. Rütschi, R. Lüthi, L. Howald, J. Frommer, H.J. Güntherodt, M. Fujihira, H. Takano, J. Vac. Sci. Technol. B 12 (3) (1993) 1973.
- (1993) J. Vac. Sci. Technol. B , vol.12 , Issue.3 , pp. 1973
- Overney, R.M.¹ Bonner, T.² Meyer, E.³ Rütschi, M.⁴ Lüthi, R.⁵ Howald, L.⁶ Frommer, J.⁷ Güntherodt, H.J.⁸ Fujihira, M.⁹ Takano, H.¹⁰

23
- 0002841766
- R. Wiesendanger, H.-J. Güntherodt (Eds.), Springer, Berlin
- D. Tomanek, in: R. Wiesendanger, H.-J. Güntherodt (Eds.), Scanning Tunneling Microscopy III, Springer, Berlin, 1993, pp. 267-292.
- (1993) Scanning Tunneling Microscopy III , pp. 267-292
- Tomanek, D.¹

24
- 0000015299
- C. Ascoli, F. Dinelli, C. Frediani, M. Salerno, J. Vac. Sci. Technol. 12 (1994) 1642.
- (1994) J. Vac. Sci. Technol. , vol.12 , pp. 1642
- Ascoli, C.¹ Dinelli, F.² Frediani, C.³ Salerno, M.⁴

25
- 0030173080
- C. Mihalcea, W. Scholz, S. Werner, S. Münster, E. Oesterschulze, R. Kassing, Appl. Phys. Lett. 68 (25) (1996) 3531-3533.
- (1996) Appl. Phys. Lett. , vol.68 , Issue.25 , pp. 3531-3533
- Mihalcea, C.¹ Scholz, W.² Werner, S.³ Münster, S.⁴ Oesterschulze, E.⁵ Kassing, R.⁶

26
- 0001567218
- W. Kulisch, A. Malave, G. Lippold, W. Scholz, C. Mihalcea, E. Oesterschulze, Diamond and Related Materials 6 (1997) 906-911.
- (1997) Diamond and Related Materials , vol.6 , pp. 906-911
- Kulisch, W.¹ Malave, A.² Lippold, G.³ Scholz, W.⁴ Mihalcea, C.⁵ Oesterschulze, E.⁶

27
- 84916277551
- C.M. Mate, R. Erlandsson, G.M. McClelland, S. Chiang, J. Vac. Sci. Technol. A 6 (1988) 575.
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 575
- Mate, C.M.¹ Erlandsson, R.² McClelland, G.M.³ Chiang, S.⁴

28
- 36449000096
- R.A. Said, G.E. Bridges, D.J. Thomson, Appl. Phys. Lett. 64 (11) (1994) 1442-1444.
- (1994) Appl. Phys. Lett. , vol.64 , Issue.11 , pp. 1442-1444
- Said, R.A.¹ Bridges, G.E.² Thomson, D.J.³

29
- 0027111086
- A.S. Hou, F. Ho, D.M. Bloom, Electron. Lett. 28 (25) (1992) 2302.
- (1992) Electron. Lett. , vol.28 , Issue.25 , pp. 2302
- Hou, A.S.¹ Ho, F.² Bloom, D.M.³

30
- 0027677021
- C. Böhm, F. Saurenbach, P. Taschner, C. Rohts, E. Kubalek, J. Phys. D 26 (1993) 1801-1805.
- (1993) J. Phys. D , vol.26 , pp. 1801-1805
- Böhm, C.¹ Saurenbach, F.² Taschner, P.³ Rohts, C.⁴ Kubalek, E.⁵

31
- 0029323470
- A. Leyk, C. Böhm, D. van der Weide, E. Kubalek, Electron. Lett. 31 (13) (1995) 1046-1047.
- (1995) Electron. Lett. , vol.31 , Issue.13 , pp. 1046-1047
- Leyk, A.¹ Böhm, C.² Van Der Weide, D.³ Kubalek, E.⁴

32
- 0343713362
- C. Böhm, J. Sprengepiel, E. Otterbeck, M. Kubalek, J. Vac. Sci. Technol. B 14 (2) (1996) 842-844.
- (1996) J. Vac. Sci. Technol. B , vol.14 , Issue.2 , pp. 842-844
- Böhm, C.¹ Sprengepiel, J.² Otterbeck, E.³ Kubalek, M.⁴

33
- 0029305789
- B.A. Nechay, F. Ho, A.S. Hou, D.M. Bloom, J. Vac. Sci. Technol. B 13 (3) (1995) 1369.
- (1995) J. Vac. Sci. Technol. B , vol.13 , Issue.3 , pp. 1369
- Nechay, B.A.¹ Ho, F.² Hou, A.S.³ Bloom, D.M.⁴

34
- 0030188632
- A.S. Hou, B.A. Nechay, D.M. Bloom, Opt. Quantum Electron. 28 (7) (1996) 820-841.
- (1996) Opt. Quantum Electron , vol.28 , Issue.7 , pp. 820-841
- Hou, A.S.¹ Nechay, B.A.² Bloom, D.M.³

35
- 33746232609
- U.T. Dürig, D.W. Pohl, F. Rohner, J. Appl. Phys. 59 (1986) 3318-3327.
- (1986) J. Appl. Phys. , vol.59 , pp. 3318-3327
- Dürig, U.T.¹ Pohl, D.W.² Rohner, F.³

36
- 84975608598
- E. Betzig, A. Harootunian, A. Lewis, M. Isaacson, Appl. Opt. 25 (1986) 1890-1900.
- (1986) Appl. Opt. , vol.25 , pp. 1890-1900
- Betzig, E.¹ Harootunian, A.² Lewis, A.³ Isaacson, M.⁴

37
- 0000799639
- S. Berntsen, J. Opt. Soc. Am. A10 (1993) 878-885.
- (1993) J. Opt. Soc. Am. , vol.A10 , pp. 878-885
- Berntsen, S.¹

38
- 84975641298
- N. Cerre, F. De Fornel, J.P. Goudonnet, Appl. Opt. 31 (1992) 903-908.
- (1992) Appl. Opt. , vol.31 , pp. 903-908
- Cerre, N.¹ De Fornel, F.² Goudonnet, J.P.³

39
- 3743151120
- E. Betzig, J.K. Trautman, Science 257 (1992) 189-195.
- (1992) Science , vol.257 , pp. 189-195
- Betzig, E.¹ Trautman, J.K.²

40
- 0028137086
- W.P. Ambrose, P.M. Goodwin, J.C. Martin, R.A. Keller, Science 265 (1994) 364-367.
- (1994) Science , vol.265 , pp. 364-367
- Ambrose, W.P.¹ Goodwin, P.M.² Martin, J.C.³ Keller, R.A.⁴

41
- 0028485431
- M.H. Moers, H.E. Gaub, N.F. van Hulst, Langmuir 10 (8) (1994) 2774-2777.
- (1994) Langmuir , vol.10 , Issue.8 , pp. 2774-2777
- Moers, M.H.¹ Gaub, H.E.² Van Hulst, N.F.³

42
- 0000769082
- U.Ch. Fischer, Phys. Rev. Lett. 62 (1989) 458-461.
- (1989) Phys. Rev. Lett. , vol.62 , pp. 458-461
- Fischer, U.Ch.¹

43
- 84975649728
- E. Betzig, J.K. Trautman, Appl. Opt. 31 (1992) 4563-4568.
- (1992) Appl. Opt. , vol.31 , pp. 4563-4568
- Betzig, E.¹ Trautman, J.K.²

44
- 0028493855
- M. Radmacher, P.E. Hillner, P.K. Hansma, Rev. Sci. Instrum. 65 (1994) 2737-2738.
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 2737-2738
- Radmacher, M.¹ Hillner, P.E.² Hansma, P.K.³

45
- 0002666710
- A.G. Ruiter, M.H.P. Moers, N.F. van Hulst, J. Vac. Sci. Technol. B 14 (2) (1996) 597-601.
- (1996) J. Vac. Sci. Technol. B , vol.14 , Issue.2 , pp. 597-601
- Ruiter, A.G.¹ Moers, M.H.P.² Van Hulst, N.F.³

46
- 0003469907
- D.W. Pohl, D. Courjon (Eds.), Kluwer, Dordrecht
- H.U. Danzebrink, U.C. Fischer, in: D.W. Pohl, D. Courjon (Eds.), Near Field Optics, Kluwer, Dordrecht, 1993.
- (1993) Near Field Optics
- Danzebrink, H.U.¹ Fischer, U.C.²

47
- 0029734819
- S. Akamine, H. Kuwano, Appl. Phys. Lett. 68 (5) (1994) 579-581.
- (1994) Appl. Phys. Lett. , vol.68 , Issue.5 , pp. 579-581
- Akamine, S.¹ Kuwano, H.²

48
- 0000555687
- M.W.J. Prins, R.H.M. Groenveld, D.L. Abraham, H. van Kempen, Appl. Phys. Lett. 66 (9) (1995) 1141-1143.
- (1995) Appl. Phys. Lett. , vol.66 , Issue.9 , pp. 1141-1143
- Prins, M.W.J.¹ Groenveld, R.H.M.² Abraham, D.L.³ Van Kempen, H.⁴

49
- 36448999534
- A.M. Chang, H.D. Hallen, L. Harriott, H.F. Hess, H.L. Kao, J. Kwo, E.R. Miller, R. Wolfe, J. van der Ziel, T.Y. Chang, Appl. Phys. Lett. 61 (1992) 1974.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1974
- Chang, A.M.¹ Hallen, H.D.² Harriott, L.³ Hess, H.F.⁴ Kao, H.L.⁵ Kwo, J.⁶ Miller, E.R.⁷ Wolfe, R.⁸ Van Der Ziel, J.⁹ Chang, T.Y.¹⁰

50
- 0022954823
- B.R. McAvoy (Ed.), New York
- C.C. Williams, H.K. Wickramasinghe, in: B.R. McAvoy (Ed.), Ultrasonics Symp. Proc., IEEE, New York, 1986, pp. 393-397.
- (1986) Ultrasonics Symp. Proc., IEEE , pp. 393-397
- Williams, C.C.¹ Wickramasinghe, H.K.²

51
- 0003564617
- P. Hess, J. Pelzl (Eds.), Springer, Heidelberg
- C.C. Williams, H.K. Wickramasinghe, in: P. Hess, J. Pelzl (Eds.), Photoacoustic and Photothermal Phenomena, Springer, Heidelberg, 1988, pp. 364-369.
- (1988) Photoacoustic and Photothermal Phenomena , pp. 364-369
- Williams, C.C.¹ Wickramasinghe, H.K.²

52
- 0141774760
- J. Xu, K. Läuger, K. Dransfeld, I.H. Wilson, Rev. Sci. Instrum. 65 (1994) 2262-2266.
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 2262-2266
- Xu, J.¹ Läuger, K.² Dransfeld, K.³ Wilson, I.H.⁴

53
- 0000773602
- M. Stopka, L. Hadjiiski, E. Oesterschulze, R. Kassing, J. Vac. Sci. Technol. B 13 (1995) 2153-2156.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2153-2156
- Stopka, M.¹ Hadjiiski, L.² Oesterschulze, E.³ Kassing, R.⁴

54
- 0030082712
- E. Oesterschulze, M. Stopka, Microelectron. Eng. 31 (1996) 241-248.
- (1996) Microelectron. Eng. , vol.31 , pp. 241-248
- Oesterschulze, E.¹ Stopka, M.²

55
- 0346951895
- O. Marti, R. Möller (Eds.), Kluwer Dordrecht
- E. Oesterschulze, M. Stopka, L. Hadjiiski, R. Kassing, in: O. Marti, R. Möller (Eds.), Photons and Local Probes, Kluwer Dordrecht, 1995, pp. 345-350.
- (1995) Photons and Local Probes , pp. 345-350
- Oesterschulze, E.¹ Stopka, M.² Hadjiiski, L.³ Kassing, R.⁴

56
- 0028443485
- R.J. Pylkki, P.J. Moyer, P.E. West, Jpn. J. Appl. Phys. Part 1 33 (1994) 3785-3790.
- (1994) Jpn. J. Appl. Phys. Part 1 , vol.33 , pp. 3785-3790
- Pylkki, R.J.¹ Moyer, P.J.² West, P.E.³

57
- 0028609017
- M. Maywald, R.J. Pylkki, L.J. Balk, Scanning Microsc. 8 (1994) 181-188.
- (1994) Scanning Microsc. , vol.8 , pp. 181-188
- Maywald, M.¹ Pylkki, R.J.² Balk, L.J.³

58
- 36449004953
- O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, A. Majumdar, Appl. Phys. Lett. 66 (1995) 694-696.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 694-696
- Nakabeppu, O.¹ Chandrachood, M.² Wu, Y.³ Lai, J.⁴ Majumdar, A.⁵

59
- 20544448056
- A. Majumdar, J.P. Carrejo, J. Lai, M. Chandrachood, Appl. Phys. Lett. 62 (1993) 2501-2503.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2501-2503
- Majumdar, A.¹ Carrejo, J.P.² Lai, J.³ Chandrachood, M.⁴

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