Properties of SiO2 and Al2O3 films for use in UV-optical coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3133, Issue , 1997, Pages 183-193

  Thielsch, Roland ^a   Duparré, Angela ^a   Schulz, Ulrike ^a   Kaiser, Norbert ^a   Mertin, Michael ^a   Bauer, Harry ^a  

^a FIAOPE   (Germany)

Author keywords

Laser damage; Microstructure; Optical coatings; Optical properties; UV irradiation

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFLECTION (STRUCTURES); EXCIMER LASERS; INFRARED SPECTROSCOPY; ION BEAM ASSISTED DEPOSITION; LASER BEAM EFFECTS; LASER DAMAGE; LIGHT SCATTERING; MICROSTRUCTURE; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; SPECTROPHOTOMETRY; STRESS ANALYSIS; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY; ULTRAVIOLET RADIATION;

PLASMA ION ASSISTED DEPOSITION (PIAD);

OPTICAL COATINGS;

EID: 0031289010     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.290192     Document Type: Conference Paper

References (19)

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7. 2 -protective coatings on plastic optics deposited with plasma-IAD
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