SiO2 protective coatings on plastic optics deposited with plasma IAD

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2776, Issue , 1996, Pages 169-174

  Schulz, Ulrike ^a   Jakobs, Stefan ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IONS; MOISTURE; OPTICAL PROPERTIES; PLASMA APPLICATIONS; PLASTICS APPLICATIONS; POLYCARBONATES; PROTECTIVE COATINGS; SEMICONDUCTING SILICON; SILICA;

BIAS VOLYAGE; PLASMA ION ASSISTED DEPOSITION; PLASTIC OPTICS; SURFACE MICROTOPOGRAPHY;

OPTICAL COATINGS;

EID: 0029725966     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.246810     Document Type: Conference Paper

References (17)