Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3110, Issue , 1997, Pages 509-576

  Duparré, Angela ^a   Jakobs, Stefan ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Atomic force microscopy; Light scattering; Optical coatings; Roughness; Surface defects; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMS; FILM PREPARATION; LIGHT SCATTERING; MULTILAYER FILMS; MULTILAYERS; OPTICAL COATINGS; OPTICAL MATERIALS; OPTICAL MICROSCOPY; OXIDE FILMS; PROTECTIVE COATINGS; REFRACTION; SCATTERING; SURFACE DEFECTS; SURFACE MORPHOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

DEFECT PROPAGATION; FILM ROUGHNESS; LIGHT SCATTERING METHODS; MICRO TOPOGRAPHIES; MULTI-LAYER COATINGS; OXIDE COATINGS; POLISHED SURFACES; ROUGH SUBSTRATES; ROUGHNESS; SINGLE LAYERS; SINGLE-LAYER FILMS; SUBSTRATE SURFACES; THICK MULTILAYERS; UV SPECTRAL REGIONS;

SUBSTRATES;

EID: 0347379551     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281375     Document Type: Conference Paper

References (12)

1. H.K. Pulker, Coatings on glass, chapter 8, Elsevier, Oxford, 1984
2. A. Duparré, "Light scattering of thin dielectric films," Thin films for optical coatings, ed. R. Hummel & K. Guenther, pp. 273-303, CRC Press, Boca Raton, 1995
3. M.A. Kozlowski, "Damage-resistant laser coatings", Thin films for optical systems, ed. F. Flory, pp.521-550, Marcel Dekker, New York 1995
4. N. Kaiser, H. Uhlig, U. Schallenberg, B. Anton, U. Kaiser, K. Mann, E. Eva, "High damage threshold A12O3/SiO2 dielectric coatings for excimer lasers," Thin Solid Films 260, 86-92 (1995)
5. K.H.Guenther, "The influence of the substrate surface on the performance of optical coatings," Thin Solid Films 77, 239-251 (1981)
6. C. Ruppe, A. Duparré, "Roughness analysis of optical films and substrates by atomic force microscopy," Thin Solid Films 288, 8-13 (1996)
7. A. Duparré, S. Gliech, " Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement," Proc. SPIE 3110 (1997) to be published
8. H. Truckenbrodt, A. Dupaffé, U. Schuhmann, "Roughness and defect characterization of optical surfaces by light scattering measurements," Proc. SPIE 1781, 139-151 (1992)
9. A. Duparré, A. Kiesel, S. Gliech, "Optical scattering and surface microstructure of thin films for laser application," The Review of Laser Engineering, Japan, 24, 68-76 (1996)
10. J. Dijon, P. Garrec, N. Kaiser, U. Schallenberg, "Influence of substrate cleaning on LIDT of 355 nm coatings," Proc. SPIE 2966 (1996) to be published
11. S. Pichlmaier, K. Hehl, U. Schuhmann, S. Gliech, A. Duparré, "Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods," Proc. SPIE 2775, 287-296 (1996)
12. A. Duparré, S. Jakobs, "Combination of surface characterization techniques for investigating optical thin-film components," Applied Optics 35, 5052-5058 (1996)