Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3110, Issue , 1997, Pages 566-573

  Duparré, Angela ^a   Gliech, Stefan ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Defect detection; Light scattering; Quality control; Surface roughness

Indexed keywords

LIGHT; LIGHT SCATTERING; LIGHT SOURCES; METAL ANALYSIS; OPTICAL ENGINEERING; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; REFRACTION; SCATTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; TOTAL QUALITY MANAGEMENT;

BACKSCATTERED LIGHTS; DEFECT DETECTION; GLASS SUBSTRATES; IR SPECTRAL REGIONS; ISO PROJECTS; LIGHT SCATTERING MEASUREMENTS; MACHINED SURFACES; NON-CONTACT TESTING; OPTICAL COMPONENTS; OPTICAL SURFACES; SPECTRAL REGIONS; SURFACE QUALITIES;

QUALITY CONTROL;

EID: 34248656777     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281370     Document Type: Conference Paper

References (11)

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