Ion flux characteristics in arc vapor deposition of TiN

Surface and Coatings Technology

Volumn 36, Issue 1-2, 1988, Pages 243-255

  Bergman, Clark ^a  

^a Multi Arc Scientific Coatings   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TITANIUM COMPOUNDS--VAPOR DEPOSITION;

ARC VAPOR DEPOSITION; TITANIUM NITRIDE; VAPOR ION DEPOSITION;

METALS AND ALLOYS;

EID: 0024138022     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(88)90154-5     Document Type: Article

References (14)

1. Effect of Monolayer Adsorption on the Ejection of Electrons from Metals by Ions
2. Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN films