Characterization of a ti vacuum arc and the structure of deposited ti and tin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 5, Issue 1, 1987, Pages 22-28

  Martin, P J ^a   Netterfield, R P ^a   McKenzie, D R ^b   Falconer, I S ^b   Pacey, C G ^a   Tomas, P ^a   Sainty, W G ^a  

^a CSIRO INDUSTRIAL PHYSICS   (Australia)

^b UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042260172     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.574132     Document Type: Article

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