Positive ions in C4F8 RF discharge in a planar diode

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5296-5299

  Sasaki, Shinya ^a   Hirose, Yuji ^a   Ishikawa, Itsuo ^a   Nagaseki, Kazuya ^b   Saito, Yukinori ^a   Suganomata, Shinji ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

C4F8 gas; Mass spectrometry; Plasma potential; Positive ion species; RF discharge

Indexed keywords

PLANAR DIODES; QUADRUPOLE MASS SPECTROMETERS;

CARBON INORGANIC COMPOUNDS; IONS; MASS SPECTROMETERS; PLASMA DIODES;

ELECTRIC DISCHARGES;

EID: 0031210264     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5296     Document Type: Article

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