A spatially-averaged model for high density discharges

Vacuum

Volumn 47, Issue 3, 1996, Pages 215-220

  Meyyappan, M ^a   Govindan, T R ^a  

^a Scientific Research Associates Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; ELECTRIC DISCHARGES; ELECTRON CYCLOTRON RESONANCE; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA FLOW; PLASMA SOURCES; PLASMA THEORY; PRESSURE;

ENERGY CONSERVATION EQUATIONS; HIGH DENSITY DISCHARGES; INDUCTIVELY COUPLED PLASMA; MASS CONSERVATION EQUATIONS; PLASMA PROCESSING TECHNOLOGY; PLASMA REACTORS; SPATIALLY AVERAGED MODEL;

PLASMAS;

EID: 0030107655     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(95)00231-6     Document Type: Article

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