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Journal of Applied Physics

Volumn 68, Issue 9, 1990, Pages 4461-4473

Power dissipation in capacitively coupled rf discharges

(1) Beneking, C a

a PHILIPS RESEARCH LABORATORIES (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549100922 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.346196 Document Type: Article

Times cited : (96)

References (34)

1
- 0003400638
- (Wiley, New York).
- (1980) Glow Discharge Processes
- Chapman, B.¹

2
- 0003640710
- (Delphic Associates, Falls Church, VA).
- (1986) Soviet Radio Frequency Discharge Research
- Godyak, V.A.¹

3
- 84950845344
- edited by R. Devonshire, J. Meads, and D. O. Wharmby (University of Sheffield, Sheffield, UK)
- (1989) Proceedings of the Fifth International Symposium on the Science and Technology of Light Sources , pp. 153
- Beneking, C.¹

4
- 0014761931
- (1970) IBM J. Res. Develop. , vol.14 , pp. 168
- Koenig, H.R.¹ Maissel, L.I.²

5
- 36549100807
- (1985) J. Appl. Phys. , vol.57 , pp. 59
- Köhler, K.¹ Coburn, J.W.² Horme, D.E.³ Kay, E.⁴

6
- 3242871396
- (1983) Appl. Phys. Lett. , vol.42 , pp. 416
- van Roosmalen, A.J.¹

7
- 11644321945
- (1985) J. Appl. Phys. , vol.58 , pp. 653
- van Roosmalen, A.J.¹ van den Hoek, W.G.M.² Kalter, H.³

8
- 0022817910
- (1986) J. Electrochem. Soc. , vol.133 , pp. 2315
- Allen, K.D.¹ Sawin, H.H.² Mocella, M.T.³ Jenkins, M.W.⁴

9
- 0041848725
- (1987) J. Appl. Phys. , vol.62 , pp. 4688
- Bletzinger, P.¹ Flemming, M.J.²

10
- 0039679165
- (1954) Z. Angew. Phys. , vol.6 , pp. 456
- Schneider, F.¹

11
- 0020499542
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 60
- Horwitz, C.M.¹

12
- 0018308598
- (1979) IBM J. Res. Develop. , vol.23 , pp. 3
- Keller, J.H.¹ Pennebaker, W.B.²

13
- 0018308599
- (1979) IBM J. Res. Develop. , vol.23 , pp. 16
- Pennebaker, W.B.¹

14
- 84936113764
- (1987) Mikrowellen Mag. , vol.13 , pp. 22
- Böhm, G.¹

15
- 36549101828
- (1987) J. Appl. Phys. , vol.61 , pp. 81
- Barnes, M.S.¹ Colter, T.J.² Elta, M.E.³

16
- 0004153441
- (Nagoya Institute of Technology, Nagoya, Japan).
- (1981) Recommended Values of Transport Cross Sections for Elastic Collision and Total Collision Cross Section for Electrons in Atomic and Molecular Gases
- Hayashi, M.¹

17
- 0004172553
- edited by E. E. Kunhardt and L. H. Luessen (Plenum, New York, 1983), p. (Proceedings of NATO Advanced Study Inst, Les Arcs, France).
- (1981) Electrical Breakdown in Gases, Part B , pp. 347
- Marec, J.¹ Bloyet, E.² Chaker, M.³ Leprince, P.⁴ Nghiem, P.⁵

18
- 84916700288
- (1963) Opt. Spektrosk. , vol.15 , pp. 5
- Kagan, Y.M.¹ Lyagushchenko, R.I.² Khakhaev, A.D.³

19
- 0003428285
- reissue of 3rd Edition, edited by D. E. Gray (McGraw‐Hill, New York), Table 5d‐8.
- (1982) American Institute of Physics Handbook

20
- 0024131141
- (1988) IEEE Trans. Plasma Sci. , vol.PS‐16 , pp. 638
- Lieberman, M.A.¹

21
- 0010012614
- (1989) Appl. Phys. Lett. , vol.54 , pp. 317
- Biehler, S.¹

22
- 36549099890
- (1989) J. Appl. Phys. , vol.65 , pp. 999
- Riemann, K.-U.¹

23
- 36549098595
- (1989) J. Appl. Phys. , vol.65 , pp. 4186
- Lieberman, M.A.¹

24
- 0022706010
- (1986) IEEE Trans. Plasma Sci. , vol.PS‐14 , pp. 78
- Graves, D.B.¹ Jensen, K.F.²

25
- 0000048243
- (1987) Phys. Rev. A , vol.36 , pp. 2782
- Boeuf, J.-P.¹

26
- 0022704635
- (1986) IEEE Trans. Plasma Sci. , vol.PS‐14 , pp. 188
- Kushner, M.J.¹

27
- 0001416615
- (1972) Sov. Phys. Tech. Phys. , vol.16 , pp. 1073
- Godyak, V.A.¹

28
- 0002575923
- (1985) J. Appl. Phys. , vol.57 , pp. 53
- Popov, O.A.¹ Godyak, V.A.²

29
- 0007850288
- (1927) Phys. Rev. , vol.30 , pp. 305
- Compton, K.T.¹ Morse, P.M.²

30
- 0005150516
- (1955) Phys. Rev. , vol.98 , pp. 1658
- Warren, R.¹

31
- 0001062196
- (1957) Phys. Rev. , vol.105 , pp. 354
- Frost, L.S.¹

32
- 0003740710
- (The MIT Press, Cambridge, MA and Wiley, New York)
- (1959) Basic Data of Plasma Physics , pp. 65
- Brown, S.C.¹

33
- 0021439940
- (1984) J. Phys. D , vol.17 , pp. 1175
- Ferreira, C.M.¹ Loureiro, J.²

34
- 0006900160
- (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 347
- Heidenreich, J.E.¹ Paraszczak, J.R.² Moisan, M.³ Sauve, G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.