The Effects of a Small Transverse Magnetic Field upon a Capacitively Coupled RF Discharge

IEEE Transactions on Plasma Science

Volumn 23, Issue 4, 1995, Pages 636-643

  Hutchinson, D A W ^a   Turner, M M ^a   Doyle, R A ^a   Hopkins, M B ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CAPACITORS; CYCLOTRONS; ELECTRONS; MAGNETIC FIELD EFFECTS; MAGNETOHYDRODYNAMICS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA HEATING; PLASMA SHEATHS; PLASMA SIMULATION;

CAPACITIVELY COUPLED RADIO FREQUENCY DISCHARGE; ELECTRON CYCLOTRON ORBIT RADIUS; MONTE CARLO COLLISIONS; ONE DIMENSIONAL PARTICLE IN CELL SIMULATION; STOCHASTIC SHEATH;

GLOW DISCHARGES;

EID: 0029352533     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.467985     Document Type: Article

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