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Journal of Applied Physics

Volumn 65, Issue 11, 1989, Pages 4186-4191

Spherical shell model of an asymmetric rf discharge

(1) Lieberman, M A a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549098595 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.343298 Document Type: Article

Times cited : (87)

References (19)

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- private communication
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- M.Eng. thesis, College of Engineering, University of California, Berkeley, CA
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.