Electrical Characteristics of Parallel-Plate RF Discharges in Argon

IEEE Transactions on Plasma Science

Volumn 19, Issue 4, 1991, Pages 660-676

  Godyak, Valery A ^a   Piejak, Robert B ^a   Alexandrovich, Benjamin M ^a  

^a VERIZON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; MATHEMATICAL MODELS; PLASMAS--SHEATHS;

PARALLEL PLATES; RF DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0026203031     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.90309     Document Type: Article

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