Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor

Applied Physics Letters

Volumn 68, Issue 10, 1996, Pages 1427-1429

  Minne, S C ^a   Manalis, S R ^a   Atalar, A ^a   Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000286885     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116102     Document Type: Article

References (12)

1. F. J. Giessibl, Science 267, 68 (1995).
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3. M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, in Proceedings of Transducers '91, IEEE publication 91 CH2817-5, p. 448 (1991).
4. K. Takata, Jpn. J. Appl. Phys. 32, 2455 (1993).
5. J. W. P. Hsu, M. Lee, and B. S. Deaver, Rev. Sci. Instrum. 66, 3177 (1995).
6. T. Itoh and T. Suga, in Proceedings of Transducers'95, Stockholm, Sweden (Royal Swedish Academy of Engineering Science IVA, Stockholm, 1995), p. 632.
7. T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
8. K. Takata, Rev. Sci. Instrum. 64, 2598 (1993).
9. S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995).
10. S. R. Manalis, S. C. Minne, and C. F. Quate (unpublished).
11. This resistor can be used as a piezoresistor for an alternative method of sensing deflection, but since we now use the ZnO as both the sensor and actuator, the silicon resistor is free to be used as a bias path for lithography, heating, or tunneling in future experiments.
12. K. L. Johnson, Contact Mechanics (Cambridge University Press, Cambridge, England, 1985).