Design, fabrication, and characterization of electrostatic microrelays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2642, Issue , 1995, Pages 64-73

  Roy, Shuvo ^a   Mehregany, Mehran ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Electroless plating; Electromechanical relays; MEMS; Microelectromechanical systems; Microrelays; Nickel surface micromaching; Switches

Indexed keywords

ASPECT RATIO; CURRENT DENSITY; ELECTRIC RESISTANCE; ELECTROLESS PLATING; ELECTROSTATICS; LITHOGRAPHY; MICROMACHINING; NICKEL; SEMICONDUCTOR DEVICE MANUFACTURE;

ELECTROSTATIC MICRORELAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029418978     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.221184     Document Type: Conference Paper

References (8)

1. Proc. symp. microstructures and microfabricated syst.
2. Proc. symp. electrochemical microfabrication
3. Proc. symp. electrochemical microfabrication