Thermal microactuators for surface-micromachining processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2642, Issue , 1995, Pages 10-21

  Comtois, John H ^a   Bright, Victor M ^a   Phipps, Mark W ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Actuators; Microelectromechanical systems; Micromachining

Indexed keywords

CAPACITORS; ELECTRIC POTENTIAL; ELECTROPLATING; FLIP FLOP CIRCUITS; INTEGRATED CIRCUITS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; POLYCRYSTALLINE MATERIALS; THERMAL CONDUCTIVITY;

SURFACE MICROMACHINING; THERMAL ACTUATORS;

MICROMACHINING;

EID: 0029418995     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.221154     Document Type: Conference Paper

References (11)

1. Thermo-magnetic metal flexure actuators
2. Micromachined 1×2 optical fiber switch
3. High-level CAD melds micromachined devices with foundries
4. Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process
5. A methodical approach to the design of compliant micromechanisms
6. Design techniques for surface-micromachined polysilicon processes
7. Batch fabricated area-efficient milli-actuators
8. Microfabricated tweezers with a large gripping force and a large range of motion