Design techniques for surface-micromachining MEMS processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2639, Issue , 1995, Pages 211-222

  Comtois, John H ^a   Bright, Victor M ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

MEMS; Micromachining; Polycrystalline silicon

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0029418972     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.221278     Document Type: Conference Paper

References (14)

1. Design, fabrication, modeling, and testing of a surface-micromachined micromirror device
2. An ultra-sensitive capacitive pressure sensor with a bossed dielectric diaphragm
3. Thermal microactuators for surface-micromachining processes
4. Thermal assembly of polysilicon microstructures
5. Microfabricated hinges
6. Three dimensional structures made with microfabricated hinges
7. Micromachined free-space integrated optics
8. Precision and performance of polysilicon micromirrors for hybrid integrated optics
9. Dynamics of polysilicon parallel-plate electrostatic actuators
10. Implementation of hexagonal micromirror arrays as phase mostly spatial light modulators
11. A 128×128 frame-addressed deformable mirror spatial light modulator
12. High-level CAD melds micromachined devices with foundries