Surface micromachined pressure transducers

Sensors and Actuators: A. Physical

Volumn 28, Issue 2, 1991, Pages 133-146

  Guckel, H ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING SILICON--FILMS; SENSORS;

POLYSILICON;

PRESSURE TRANSDUCERS;

EID: 0026186714     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(91)85021-F     Document Type: Article

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