Fabrication of Silicon Condenser Microphones Using Single Wafer Technology

Journal of Microelectromechanical Systems

Volumn 1, Issue 3, 1992, Pages 147-154

  Scheeper, P R ^a   Van Der Donk, A G H ^a   Olthuis, W ^a   Bergveld, P ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001256708     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.186394     Document Type: Article

References (19)

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