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Volumn 100, Issue 8, 2002, Pages 26-33

A new approach to controlling metal deposition during the pulse plating process

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CATHODES; CONTROL SYSTEMS; CURRENT DENSITY; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ELECTRIC WIRING; ELECTRONIC EQUIPMENT; MULTILAYERS; PLATING;

EID: 0012743351     PISSN: 00260576     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-0576(02)80688-2     Document Type: Note
Times cited : (6)

References (23)
  • 11
    • 0003955896 scopus 로고
    • VCH Publishers Inc., New York
    • Gileadi, E., "Electrode Kinetics," p. 154, VCH Publishers Inc., New York; 1993
    • (1993) Electrode Kinetics , pp. 154
    • Gileadi, E.1
  • 17
    • 33645273688 scopus 로고    scopus 로고
    • Copper metallization of semiconductor interconnects - Issues and prospects
    • Western Reserve University, Cleveland
    • Landau, U., "Copper Metallization of Semiconductor Interconnects - Issues and Prospects," Cell-Design, Western Reserve University, Cleveland; 2001
    • (2001) Cell-design
    • Landau, U.1
  • 21
    • 0003438790 scopus 로고
    • Theory and practice of pulse plating
    • Finishers Society, Orlando, Fla.
    • Puippe, J. and F. Leaman, "Theory and Practice of Pulse Plating." American Electroplaters and Surface Finishers Society, Orlando, Fla.; 1986
    • (1986) American Electroplaters and Surface
    • Puippe, J.1    Leaman, F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.