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Volumn 148, Issue 4, 2001, Pages

Mass Transfer Models for the Electrodeposition of Copper with a Buffering Agent

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0011245695     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1354618     Document Type: Article
Times cited : (17)

References (20)
  • 2
    • 0032166781 scopus 로고    scopus 로고
    • P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, in Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: Materials, Processes, and Reliability, P. C. Andricacos, J. O. Dukovic, G. S. Mathad, G. M. Oleszek, H. S. Rathore, and C. R. Simpson, Editors, PV 98-6, p. 48, The Electrochemical Society Proceedings Series, Pennington, NJ (1999); IBM J. Res. Dev., 42, 567 (1998).
    • (1998) IBM J. Res. Dev. , vol.42 , pp. 567
  • 16
    • 0442297353 scopus 로고    scopus 로고
    • Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY
    • D. T. Price, Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY (1999); D. T. Price and R. J. Guttmann, in Advanced Metallization Conference 1998, Proceedings, MRS, p. 653 (1999); D. T. Price and R. J. Guttmann, Thin Solic Films, 308-309, 523 (1997).
    • (1999)
    • Price, D.T.1
  • 17
    • 0442312951 scopus 로고    scopus 로고
    • Proceedings, MRS
    • D. T. Price, Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY (1999); D. T. Price and R. J. Guttmann, in Advanced Metallization Conference 1998, Proceedings, MRS, p. 653 (1999); D. T. Price and R. J. Guttmann, Thin Solic Films, 308-309, 523 (1997).
    • (1999) Advanced Metallization Conference 1998 , pp. 653
    • Price, D.T.1    Guttmann, R.J.2
  • 18
    • 0031248720 scopus 로고    scopus 로고
    • D. T. Price, Ph.D. Thesis, Rensselaer Polytechnic Institute, Troy, NY (1999); D. T. Price and R. J. Guttmann, in Advanced Metallization Conference 1998, Proceedings, MRS, p. 653 (1999); D. T. Price and R. J. Guttmann, Thin Solic Films, 308-309, 523 (1997).
    • (1997) Thin Solic Films , vol.308-309 , pp. 523
    • Price, D.T.1    Guttmann, R.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.