EUCLIDES: First phase completed!

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 34-47

  Benschop, Jos P H ^a   Dinger, Udo ^a   Ockwell, David C ^a  

^a ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; OPTICAL COATINGS; OPTICAL MULTILAYERS; OPTICAL RESOLVING POWER; PLASMA SOURCES; SYNCHROTRONS; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);

PHOTORESISTS;

EID: 0033697906     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)