Approaches to nanofabrication on Si(100) surfaces: Selective area chemical vapor deposition of metals and selective chemisorption of organic molecules

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3874-3878

  Abeln, G C ^a,b   Hersam, M C ^a   Thompson, D S ^a   Hwang, S T ^a   Choi, H ^a   Moore, J S ^a   Lyding, J W ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744363331     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590426     Document Type: Article

References (14)

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