Micro-electro-mechanical deformable mirrors for aberration control in optical systems

Optical and Quantum Electronics

Volumn 31, Issue 5, 1999, Pages 451-468

  Roggemann, Michael C ^a   Bright, Victor M ^b   Welsh, Byron M ^c   Cowan, William D ^d   Lee, Max ^d  

^a Michigan Technological University   (United States)

^b UCB 450   (United States)

^c Mission Research Corporation   (United States)

^d AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; FORMABILITY; MICROELECTROMECHANICAL DEVICES; OPTICAL VARIABLES CONTROL;

MICROELECTROMECHANICAL DEFORMABLE MIRRORS;

MIRRORS;

EID: 0032653675     PISSN: 03068919     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1006967012137     Document Type: Article

References (35)

1. Laikin, M. Lens Design, Second edn. Marcel Dekker, Inc., New York, 1995.
2. Chanan, G., J. Nelson, T. Mast, P. Wizinowich and B. Schaefer. The W. M. Keck telescope phasing camera system. In Proceedings of the SPIE on Instrumentation in Astronomy VIII, Vol. 2198, 1139-1150, 1994.
3. Dooling, D. Beyond Hubble. The Institute, IEEE monthly newsletter, p. 1, June 1996.
4. Roggemann M.C. and B.M. Welsh. Imaging through turbulence, CRC Press, Boca Raton, Florida, 1996.
5. Fried, D.L. Optical resolution through a randomly inhomogeneous medium for very long and very short exposures. J. Opt. Soc. Am., 56 1372-1379, 1966.
6. Fante, R.L. Electromagnetic beam propagation in turbulence media. Proc. IEEE 63 1669-1692, 1975.
7. Lee R.W. and J.C. Harp. Weak scattering in random media, with applications to remote probing. Proc. IEEE 57 375-406, 1969.
8. Fried, D.L. Optical heterodyne detection of an atmospherically distorted signal wave front. Proc. IEEE 55 57-67, 1967.
9. Beckers, J.M. Adaptive optics for astronomy: principles, performance, and applications. Annu. Rev. Astron. Astrophys. 31 13-62, 1993.
10. Roggemann, M.C., B.M. Welsh and R.Q. Fugate. Improving the resolution of ground-based telescopes. Rev. Mod. Phys. 69 437-505, 1997.
11. Ealey M.A. and J.A. Wellman. Deformable mirrors: design fundamentals, key performance specifications, and parametric trades. In Proceedings of the SPIE on Active and Adaptive Optical Components, Vol. 1543, 36-51, 1991.
12. Ealey M.A. and J.F. Washeba. Continuous facesheet low voltage deformable mirrors. Opt. Eng. 29 1191-1198, 1990.
13. Acton D.S. and R.C. Smithson. Solar imaging with a segmented adaptive mirror. Appl. Opt. 31 3161-3169, 1992.
14. Hornbeck, L.J. 128 × 128 deformable mirror device. IEEE Transactions on Electron Devices Ed-30 539-545, 1983.
15. Miller, L.M., M.L. Agronin, R.K. Bartman, W.J. Kaiser, T.W. Kenny, R.L. Norton and E.C. Vote. Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications. In Proceedings of the SPIE on Space Astronomical Telescopes and Instruments II, Vol. 1993, 421-430, 1977.
16. Krishnamoorthy, R., T. Bifano and G. Sandri. Statistical performance evaluation of electrostatic micro actuators for a deformable mirror. In Proceedings of the SPIE, Vol. 2881, 35-44, 1996.
17. Krishnamoorthy R. and T. Bifano. Mems arrays for deformable mirrors. In Proceedings of the SPIE, Vol. 2641, 96-104, 1995.
18. Comtois, J.H., V.M. Bright, S.C. Gustafson and M.A. Michalicek. Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators. In Proceedings of the SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, Vol. 2641, 76-87, 1995.
19. Michalicek, M.A., V.M. Bright and J.H. Comtois. Design, fabrication, modeling and testing of a surface micromachined device. In Proceedings of the 1995 ASME International Mechanical Engineering Con-gress and Exposition, San Francisco, CA, 1995.
20. Lin, T.H. Implementation and characterization of a flexure beam micromechanical spatial light modulator. Opt. Eng. 33 3643-3648, 1994.
21. Rhoadarmer, T.A., V.M. Bright, B.M. Welsh, S.C. Gustafson and T.H. Lin. Interferometric characterization of the flexure-beam micromirror device. In Proceedings of the SPIE on Integrated Optics and Microstructures II, Vol. 2291, 13-23, 1995.
22. Roggemann, M.C., V.M. Bright, B.M. Welsh, S.R. Hick, P.C. Roberts, W.D. Cowan and J.H. Comtois. Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results. Opt. Eng. 36 1326-1338, 1997.
23. Vdovin, G., S. Middelhoek and L. Sarro. Deformable mirror display with continuous reflecting surface micromachined in silicon. In Proceedings of the IEEE Micro Electro Mechanical Systems, 61-64, 1995.
24. Vdovin G. and P.M. Sarro. Flexible mirror micromachined in silicon. Appl. Opt. 34 2968-2972, 1995.
25. Vdovin, G., S. Middelhoek and P.M. Sarro. Thin-film free-space optical components micromachined in silicon. In Digest of IEEE/LEOS 1996 Summer Topical Meetings, Keystone, Co, 5-6, 1996.
26. Clark, R., J. Karpinsky, G. Borek and E. Johnson. High speed interferometric device for real time correction of aero-optic effects. In 26th AIAA Plasmadynamics and Lasers Conference, paper AIAA 95-1984, 1995.
27. Smith, W.J., Modern Optical Design: The Design of Optical Systems, McGraw-Hill, New York, Second edn., 1990.
28. Goodman, J.W. Introduction to Fourier Optics, McGraw-Hill Book, New York, 1968.
29. Oppenheim, A.V., A.S. Willsky and S.H. Nawab. Signals and Systems, Second edn. Prentice Hall, Upper Saddle River, NJ, 1997.
30. Gonzalez R.C. and R.E. Woods. Digital Image Processing, Reading, Addison-Wesley, Massachusetts, 1993.
31. Marion J.B. and M.A. Heald. Classical Electromagnetic Radiation, Second edn. Academic Press, Orlando, 1980.
32. Born M. and E. Wolf. Principles of Optics. Pergamon Press, New York, 1964.
33. Gaskill, J.D. Linear Systems, Fourier Transforms, and Optics, John Wiley & Sons, New York, 1978.
34. Osterberg, P.M., R.K. Gupta, J.R. Gilbert and S.D. Senturia. Quantitative models for the measurement of residual stress, Poisson ratio, and Young's modulus using electrostatic pull-in of beams and diaphrams. Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, 184-188, 1994.
35. Hick, S. Demonstrating optical aberration correction with a mems micro-mirror device. Master's thesis, Graduate School of Engineering, Air Force Institute of Technology (AETC), Wright-Patterson AFB OH, December 1996.