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Volumn 87, Issue 9 I, 2000, Pages 4160-4163

Generation of Frenkel defects in heavily arsenic doped silicon: A first-principles study

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[No Author keywords available]

Indexed keywords


EID: 0005852394     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373046     Document Type: Article
Times cited : (21)

References (18)
  • 6
    • 10644250257 scopus 로고
    • P. Hohenberg and W. Kohn, Phys. Rev. 136, B864 (1964); W. Kohn and L. J. Sham, ibid. 140, A1133 (1965).
    • (1964) Phys. Rev. , vol.136
    • Hohenberg, P.1    Kohn, W.2
  • 7
    • 0042113153 scopus 로고
    • P. Hohenberg and W. Kohn, Phys. Rev. 136, B864 (1964); W. Kohn and L. J. Sham, ibid. 140, A1133 (1965).
    • (1965) Phys. Rev. , vol.140
    • Kohn, W.1    Sham, L.J.2
  • 17
    • 0031339421 scopus 로고    scopus 로고
    • Defects and Diffusion in Silicon Processing, edited by T. Diaz de la Rubia et al.
    • J. Zhu, in Defects and Diffusion in Silicon Processing, edited by T. Diaz de la Rubia et al. [Mater. Res. Soc. Symp. Proc. 469, 151 (1997)].
    • (1997) Mater. Res. Soc. Symp. Proc. , vol.469 , pp. 151
    • Zhu, J.1
  • 18
    • 0002734525 scopus 로고
    • edited by F. F. Y. Wang North-Holland, Amsterdam
    • R. B. Fair, in Impurity Doping Processing in Silicon, edited by F. F. Y. Wang (North-Holland, Amsterdam, 1981), p. 315.
    • (1981) Impurity Doping Processing in Silicon , pp. 315
    • Fair, R.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.