Ab initio pseudopotential calculations of dopant diffusion in Si

Materials Research Society Symposium - Proceedings

Volumn 469, Issue , 1997, Pages 151-162

  Zhu, Jing ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; DIFFUSION IN SOLIDS; FERMI LEVEL; SEMICONDUCTING BORON; SEMICONDUCTOR DOPING;

TRANSIENT ENHANCED DIFFUSION (TED);

SEMICONDUCTING SILICON;

EID: 0031339421     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-469-151     Document Type: Conference Paper

References (24)