In Situ Rapid Thermal Oxidation and Reduction of Copper Thin Films and Their Applications in Ultralarge Scale Integration

Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

  Hu, Yao Zhi ^a   Sharangpani, Rahul ^a   Tay, Sing Pin ^a  

^a MATTSON THERMAL PRODUCTS GMBH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005383340     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1413480     Document Type: Article

References (23)

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