Ultrashallow secondary ion mass spectroscopy depth profiling of doping spikes and Si/SiGe/Si heterostructures using different primary species

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 292-297

  Kruger D ^a   Iltgen, K ^b   Heinemann, B ^a   Kurps, R ^a   Benninghoven, A ^b  

^a IHP   (Germany)

^b UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003308616     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589797     Document Type: Article

References (18)

1. A. Schüppen, U. Erben, A. Gruhle, H. Kibbel, H. Schuhmacher, and U. König, Tech. Dig. Int. Electron Devices Meet. 743 (1995).
2. D. C. Ahlgren et al., Tech. Dig. Int. Electron Devices Meet., 859 (1996).
3. D. Krüger, R. Kurps, B. Heinemann, F. Herzel, and H. P. Zeindl, J. Vac. Sci. Technol. B 14, 287 (1996).
4. M. G. Dowsett, R. D. Barlow, and P. N. Allen, J. Vac. Sci. Technol. B 12, 186 (1994).
5. C. A. King et al., Tech. Dig. Int. Electron Devices Meet. 751 (1995).
6. A. Pruijmboom et al., Tech. Dig. Int. Electron Devices Meet. 747 (1995).
7. T. F. Meister et al., Tech. Dig. Int. Electron Devices Meet. 739 (1995).
8. A. Schüppen, A. Gruhle, H. Kibbel, and U. König, J. Mater. Sci. 6, 298 (1995).
9. B. Heinemann, F. Herzel, and U. Zillmann, Solid-State Electron. 38, 1183 (1995).
10. U. Littmark, Nucl. Instrum. Methods Phys. Res. B 7/8, 684 (1985).
11. B. V. King and I. S. T. Tsong, J. Vac. Sci. Technol. A 2, 1443 (1984).
12. K. Wittmaack and N. Menzel, Appl. Phys. Lett. 50, 815 (1987).
13. K. Wittmaack, Surf. Interface Anal. 31, 323 (1994).
14. E. J. Prinz, P. M. Garone, P. V. Schwartz, X. Xiao, and J. C. Sturm, IEEE Electron Device Lett. EDL-12, 42 (1991).
15. J. W. Slotboom et al., IEEE Electron Device Lett. EDL-12, 486 (1991).
16. M. G. Dowsett, D. M. James, I. W. Drummond, M. M. El Gomati, T. A. El Bakush, F. J. Street, and R. D. Barlow, in Secondary Ion Mass Spectrometry SIMS VIII, edited by A. Benninghoven, K. T. F. Janssen, J. Tümpner, and H. W. Werner (Wiley, New York, 1992), p. 359.
17. F. Herzel, K. E. Ehwald, B. Heinemann, D. Krüger, R. Kurps, W. Röpke, and H. P. Zeindl, Surf. Interface Anal. 23, 765 (1995).
18. R. Badheka, M. Wadsworth, D. G. Armour, J. A. van den Berg, and J. B. Clegg, Surf. Interface Anal. 15, 550 (1990).