Dynamic studies of semiconductor growth processes using in situ electron microscopy

MRS Bulletin

Volumn 26, Issue 2, 2001, Pages 94-101

  Ross, Frances M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002632141     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.295     Document Type: Article

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