Studies of NiO thin film formation by atomic layer epitaxy

Materials Science and Engineering B

Volumn B54, Issue 1-2, 1998, Pages 98-103

  Utriainen, Mikko ^a   Kröger Laukkanen, Minna ^a   Niinistö, Lauri ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Atomic layer epitaxy; NiO; Thin film formation

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; GLASS; OXIDES; SUBSTRATES; THIN FILMS;

ATOMIC LASER EPITAXY;

NIOBIUM COMPOUNDS;

EID: 0002491185     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(98)00135-4     Document Type: Article

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