Two-dimensional profiling and size effects on the transient enhanced diffusion of ultralow-energy B implants in Si

Applied Physics Letters

Volumn 78, Issue 5, 2001, Pages 598-600

  Giannazzo, Filippo ^a   Priolo, Francesco ^a   Raineri, Vito ^b   Privitera, Vittorio ^b  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001735118     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1343501     Document Type: Article

References (11)

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