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Journal of Applied Physics

Volumn 80, Issue 1, 1996, Pages 56-65

Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode

(3) Becker, F a Rangelow, I W a Kassing, R a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002449936 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.362761 Document Type: Article

Times cited : (24)

References (50)

1
- 0018469799
- J. W. Coburn and H. F. Winters, J. Appl. Phys. 50, 3189 (1979).
- (1979) J. Appl. Phys. , vol.50 , pp. 3189
- Coburn, J.W.¹ Winters, H.F.²

2
- 36549100807
- K. Köhler, J. W. Coburn, D. E. Home, E. Kay, and J. H. Keller, J. Appl. Phys. 57, 59 (1985).
- (1985) J. Appl. Phys. , vol.57 , pp. 59
- Köhler, K.¹ Coburn, J.W.² Home, D.E.³ Kay, E.⁴ Keller, J.H.⁵

3
- 36549102085
- K. Köhler, D. E. Horne, and J. W. Coburn, J. Appl. Phys. 58, 3350 (1985).
- (1985) J. Appl. Phys. , vol.58 , pp. 3350
- Köhler, K.¹ Horne, D.E.² Coburn, J.W.³

4
- 36549100753
- B. E. Thompson, K. D. Allen, A. D. Richards, and H. H. Sawin, J. Appl. Phys. 59, 1890 (1986).
- (1986) J. Appl. Phys. , vol.59 , pp. 1890
- Thompson, B.E.¹ Allen, K.D.² Richards, A.D.³ Sawin, H.H.⁴

5
- 0027553821
- D. A. O. Hope, G. J. Monnington, S. G. Gill, N. Borsing, J. A. Smith, and J. A. Rees, Vacuum 44, 245 (1993).
- (1993) Vacuum , vol.44 , pp. 245
- Hope, D.A.O.¹ Monnington, G.J.² Gill, S.G.³ Borsing, N.⁴ Smith, J.A.⁵ Rees, J.A.⁶

6
- 0001471348
- J. K. Olthoff, R. J. Van Brunt, S. G. Radonov, J. A. Rees, and R. Surowiec, J. Appl. Phys. 75, 115 (1994).
- (1994) J. Appl. Phys. , vol.75 , pp. 115
- Olthoff, J.K.¹ Van Brunt, R.J.² Radonov, S.G.³ Rees, J.A.⁴ Surowiec, R.⁵

7
- 0024092852
- S. G. Ingram and N. St. J. Braithwaite, J. Phys. D 21, 1496 (1988).
- (1988) J. Phys. D , vol.21 , pp. 1496
- Ingram, S.G.¹ Braithwaite, N.St.J.²

8
- 0009567341
- S. G. Ingram and N. St. J. Braithwaite, J. Appl. Phys. 68, 5519 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 5519
- Ingram, S.G.¹ Braithwaite, N.St.J.²

9
- 0000065291
- A. D. Kuypers and H. J. Hopman, J. Appl. Phys. 67, 1229 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 1229
- Kuypers, A.D.¹ Hopman, H.J.²

10
- 0001471861
- A. D. Kuypers and H. J. Hopman, J. Appl. Phys. 63, 1894 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 1894
- Kuypers, A.D.¹ Hopman, H.J.²

11
- 34548625667
- A. Manenschijn, G. C. A. M. Janssen, E. van der Drift, and S. Radelaar, J. Appl. Phys. 69, 1253 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 1253
- Manenschijn, A.¹ Janssen, G.C.A.M.² Van Der Drift, E.³ Radelaar, S.⁴

12
- 0000765561
- W. M. Greene, M. A. Hartney, W. G. Oldham, and D. W. Hess, J. Appl. Phys. 63, 1367 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 1367
- Greene, W.M.¹ Hartney, M.A.² Oldham, W.G.³ Hess, D.W.⁴

13
- 0000393088
- C. Wild and P. Koidl, Appl. Phys. Lett. 54, 505 (1989).
- (1989) Appl. Phys. Lett. , vol.54 , pp. 505
- Wild, C.¹ Koidl, P.²

14
- 0000528150
- J. Liu, G. L. Huppert, and H. H. Sawin, J. Appl. Phys. 68, 3916 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 3916
- Liu, J.¹ Huppert, G.L.² Sawin, H.H.³

15
- 36449001598
- C. Wild and P. Koidl, J. Appl. Phys. 69, 2909 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 2909
- Wild, C.¹ Koidl, P.²

16
- 0004451791
- R. J. M. M. Snijkers, M. J. M. van Sambeek, G. M. W. Kroesen, and F. J. de Hoog, Appl. Phys. Lett. 63, 308 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 308
- Snijkers, R.J.M.M.¹ Van Sambeek, M.J.M.² Kroesen, G.M.W.³ De Hoog, F.J.⁴

17
- 0028401068
- U. Flender and K. Wiesemann, J. Phys. D 27, 509 (1994).
- (1994) J. Phys. D , vol.27 , pp. 509
- Flender, U.¹ Wiesemann, K.²

18
- 0344560492
- J. Janes and C. Huth, Appl. Phys. Lett. 61, 261 (1992).
- (1992) Appl. Phys. Lett. , vol.61 , pp. 261
- Janes, J.¹ Huth, C.²

19
- 21144474078
- J. Janes and C. Huth, J. Vac. Sci. Technol. A 10, 3086 (1992).
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3086
- Janes, J.¹ Huth, C.²

20
- 84955049609
- J. Janes and C. Huth, J. Vac. Sci. Technol. A 10, 3522 (1992).
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3522
- Janes, J.¹ Huth, C.²

21
- 0344560485
- J. Janes, J. Appl. Phys. 74, 659 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 659
- Janes, J.¹

22
- 36049053689
- R. T. C. Tsui, Phys. Rev. 168, 107 (1968).
- (1968) Phys. Rev. , vol.168 , pp. 107
- Tsui, R.T.C.¹

23
- 0014354567
- P. Benoit-Cattin and L.-C. Bernard, J. Appl. Phys. 39, 5723 (1968).
- (1968) J. Appl. Phys. , vol.39 , pp. 5723
- Benoit-Cattin, P.¹ Bernard, L.-C.²

24
- 0009984888
- A. Manenschijn and W. J. Goedheer, J. Appl. Phys. 69, 2923 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 2923
- Manenschijn, A.¹ Goedheer, W.J.²

25
- 0002274529
- D. Field, D. F. Klemperer, P. W. May, and Y. P. Song, J. Appl. Phys. 70, 82 (1991).
- (1991) J. Appl. Phys. , vol.70 , pp. 82
- Field, D.¹ Klemperer, D.F.² May, P.W.³ Song, Y.P.⁴

26
- 0000906912
- P. W. May, D. Field, and D. F. Klemperer, J. Appl. Phys. 71, 3721 (1992).
- (1992) J. Appl. Phys. , vol.71 , pp. 3721
- May, P.W.¹ Field, D.² Klemperer, D.F.³

27
- 36549092475
- B. E. Thompson, H. H. Sawin, and D. A. Fisher, J. Appl. Phys. 63, 2241 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 2241
- Thompson, B.E.¹ Sawin, H.H.² Fisher, D.A.³

28
- 0000922299
- C. W. Jurgensen and E. S. G. Shaqfeh, J. Appl. Phys. 64, 6200 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 6200
- Jurgensen, C.W.¹ Shaqfeh, E.S.G.²

29
- 85033862912
- Ph. D. thesis, Eindhoven Technical University, The Netherlands
- P. M. Vallinga, Ph. D. thesis, Eindhoven Technical University, The Netherlands, 1988.
- (1988)
- Vallinga, P.M.¹

30
- 85033867340
- edited by U. Ehlemann, H. G. Lergon, and K. Wiesemann (ISPC 91) Bochum, August 1991 IUPAC, Bochum, Germany
- S. Biehler, in Proceedings of the 10th International Symposium on Plasma Chemistry, edited by U. Ehlemann, H. G. Lergon, and K. Wiesemann (ISPC 91) Bochum, August 1991 (IUPAC, Bochum, Germany, 1991), Vol. 2, pp. 2.1-52; S. Biehler, Ph.D. thesis, Ruhr University, Bochum, Germany, 1991.
- (1991) Proceedings of the 10th International Symposium on Plasma Chemistry , vol.2
- Biehler, S.¹

31
- 85033860849
- Ph.D. thesis, Ruhr University, Bochum, Germany
- S. Biehler, in Proceedings of the 10th International Symposium on Plasma Chemistry, edited by U. Ehlemann, H. G. Lergon, and K. Wiesemann (ISPC 91) Bochum, August 1991 (IUPAC, Bochum, Germany, 1991), Vol. 2, pp. 2.1-52; S. Biehler, Ph.D. thesis, Ruhr University, Bochum, Germany, 1991.
- (1991)
- Biehler, S.¹

32
- 0029375599
- F. Becker, I. W. Rangelow, K. Maβeli, and R. Kassing, Surf. Coat. Technol. 74-75, 485 (1995).
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 485
- Becker, F.¹ Rangelow, I.W.² Maeli, K.³ Kassing, R.⁴

33
- 0013450710
- D. Margreiter, G. Walder, H. Deutsch, H. U. Poll, C. Winkler, K. Stephan, and T. D. Märk, Int. J. Mass. Spectrum. Ion Phys. 100, 143 (1990).
- (1990) Int. J. Mass. Spectrum. Ion Phys. , vol.100 , pp. 143
- Margreiter, D.¹ Walder, G.² Deutsch, H.³ Poll, H.U.⁴ Winkler, C.⁵ Stephan, K.⁶ Märk, T.D.⁷

34
- 0009920559
- R. T. Bettinger and E. H. Walker, Phys. Fluids 8, 748 (1965).
- (1965) Phys. Fluids , vol.8 , pp. 748
- Bettinger, R.T.¹ Walker, E.H.²

35
- 0023382660
- D. Maundrill, J. Slatter, A. I. Spiers, and C. C. Welch, J. Phys. D 20, 815 (1987).
- (1987) J. Phys. D , vol.20 , pp. 815
- Maundrill, D.¹ Slatter, J.² Spiers, A.I.³ Welch, C.C.⁴

36
- 0042895777
- E. Gogolides and H. H. Sawin, J. Appl. Phys. 72, 3988 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 3988
- Gogolides, E.¹ Sawin, H.H.²

37
- 0000368331
- P. W. May, D. F. Klemperer, and D. Field, J. Appl. Phys. 73, 1634 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 1634
- May, P.W.¹ Klemperer, D.F.² Field, D.³

38
- 0025444957
- Y. P. Song, D. Field, and D. F. Klemperer, J. Phys. D 23, 673 (1990).
- (1990) J. Phys. D , vol.23 , pp. 673
- Song, Y.P.¹ Field, D.² Klemperer, D.F.³

39
- 0001626887
- Y. Okuno, Y. Ohtsu, and C. Komatsu, J. Appl. Phys. 73, 1612 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 1612
- Okuno, Y.¹ Ohtsu, Y.² Komatsu, C.³

40
- 0022733628
- A. Picard, G. Turban, and B. Grolleau, J. Phys. D 19, 991 (1986).
- (1986) J. Phys. D , vol.19 , pp. 991
- Picard, A.¹ Turban, G.² Grolleau, B.³

41
- 0346951329
- K. R. Ryan and I. C. Plumb, Plasma Chem. Plasma Process. 8, 281 (1988).
- (1988) Plasma Chem. Plasma Process. , vol.8 , pp. 281
- Ryan, K.R.¹ Plumb, I.C.²

42
- 0025600070
- N. Sadeghi, H. Debontride, G. Turban, and M. C. Peignon, Plasma Chem. Plasma Process. 10, 553 (1990).
- (1990) Plasma Chem. Plasma Process. , vol.10 , pp. 553
- Sadeghi, N.¹ Debontride, H.² Turban, G.³ Peignon, M.C.⁴

43
- 0001515631
- K. R. Ryan, Plasma Chem. Plasma Process. 9, 483 (1989).
- (1989) Plasma Chem. Plasma Process. , vol.9 , pp. 483
- Ryan, K.R.¹

44
- 0347582387
- I. C. Plumb and K. R. Ryan, Plasma Chem. Plasma Process. 6, 247 (1986).
- (1986) Plasma Chem. Plasma Process. , vol.6 , pp. 247
- Plumb, I.C.¹ Ryan, K.R.²

45
- 0001004186
- K. R. Ryan and I. C. Plumb, Plasma Chem. Plasma Process. 8, 263 (1988).
- (1988) Plasma Chem. Plasma Process. , vol.8 , pp. 263
- Ryan, K.R.¹ Plumb, I.C.²

46
- 0026867682
- I. Sauers and G. Harman, J. Phys. D 25, 761 (1992).
- (1992) J. Phys. D , vol.25 , pp. 761
- Sauers, I.¹ Harman, G.²

47
- 36449001796
- T. M. Miller, A. E. Stevens, J. F. Paulson, and X. Liu, J. Chem. Phys. 100, 8841 (1994).
- (1994) J. Chem. Phys. , vol.100 , pp. 8841
- Miller, T.M.¹ Stevens, A.E.² Paulson, J.F.³ Liu, X.⁴

48
- 36549099620
- A. V. Phelps and R. J. Van Brunt, J. Appl. Phys. 64, 4269 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 4269
- Phelps, A.V.¹ Van Brunt, R.J.²

49
- 0018541435
- L. E. Kline, D. K. Davies, C. L. Chen, and P. J. Chantry, J. Appl. Phys. 50, 6789 (1979).
- (1979) J. Appl. Phys. , vol.50 , pp. 6789
- Kline, L.E.¹ Davies, D.K.² Chen, C.L.³ Chantry, P.J.⁴

50
- 0026869732
- I. Sauers and G. Harman, J. Phys. D 25, 774 (1992).
- (1992) J. Phys. D , vol.25 , pp. 774
- Sauers, I.¹ Harman, G.²

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