Recent developments in profiling optical surfaces

Applied Optics

Volumn 32, Issue 19, 1993, Pages 3442-3447

  Bennett, Jean M ^a   Elings, Virgil ^b   Kjoller, Kevin ^b  

^a NAVAL AIR WARFARE CENTER   (United States)

^b Digital Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SURFACES; MOLECULAR PHYSICS; OPTICS;

ATOMIC FORCE MICROSCOPE MEASUREMENTS; LONG-PROFILE-LENGTH MEASUREMENTS; PROFILING OPTICAL SURFACES; SURFACE PROFILING; SURFACE-SPATIAL WAVELENGTH SCALE;

CONTOUR MEASUREMENT; ATOMIC FORCE MICROSCOPY;

CHARACTERIZATION TECHNIQUES; LATERAL RESOLUTION; OPTICAL SURFACES; PROFILING INSTRUMENT; SPATIAL WAVELENGTHS; SUPER-SMOOTH OPTICAL SURFACES; SURFACE PROFILES; SURFACE WAVINESS;

EID: 0027639216     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.32.003442     Document Type: Article

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