Significant improvements in Long Trace Profiler measurement performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2855, Issue , 1996, Pages 210-219

  Takacs, Peter Z ^a   Bresloff, Cynthia J ^b,c  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c Tinsley Lab Inc   (United States)

Author keywords

Figure measurement; Optical metrology; Profilometry; Surface metrology

Indexed keywords

AIR CONDITIONING; ENVIRONMENTAL MANAGEMENT; INSTRUMENT ERRORS; PROFILOMETRY; SCANNING; THERMONUCLEAR REACTIONS;

ACCURACY AND REPEATABILITIES; ADVANCED PHOTON SOURCE; ARGONNE NATIONAL LABORATORY; ENVIRONMENTAL CONTROL; FIGURE MEASUREMENT; LONG TRACE PROFILER; OPTICAL METROLOGY; SURFACE METROLOGY;

HEAT FLUX;

EID: 85077769539     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.259843     Document Type: Conference Paper

References (6)

1. K. von Bieren, "Pencil Beam Interferometer for Aspherical Optical Surfaces", Proc. SPIE 343, 101 (1982)
2. K. von Bieren, "Interferometry of Wavefronts Reflected Off Conical Surfaces", Appl. Opt. 22, 2109, (1983)
3. P. Z. Takacs, S.-C. K. Feng, E. L. Church, S.-N. Qian, and W.-M. Liu, "Long trace profile measurements on cylindrical aspheres", in Advances in Fabrication and Metrology for Optics and Large Optics, Jones B. Arnold and Robert A Parks, eds., Proc. SPIE 966, 354-364 (1989).
4. P. Z. Takacs, K. Furenlid, R. DeBiasse, and E. L. Church, "Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth", in Surface Characterization and Testing II, J. E Grievenkamp and M Young eds Proc SPIE 1164, 203-211 (1989).
5. H. Li, X. Li, M. W. Grindel, and P. Z. Takacs, "Measurement of X-ray Telescope Mirrors Using A Vertical Scanning Long Trace Profiler", Opt. Eng. 35(2), 330-338, (1996).
6. S. C. Irick, W. R. McKinney, D. L. T. Lunt, and P. Z. Takacs, "Using a straightness reference in obtaining more accurate surface profiles", Rev. Sci. Insts., Vol. 63, 1436-1438, (1992).