Obtaining three-dimensional height profiles from a two-dimensional slope measuring instrument

Review of Scientific Instruments

Volumn 66, Issue 2, 1995, Pages 2108-2111

  Irick, Steven C ^a   Kaza, R Krishna ^a   McKinney, Wayne R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALCULATIONS; DATA PROCESSING; FUSED SILICA; INTEGRATION; ITERATIVE METHODS; MIRRORS; OPTICAL INSTRUMENTS; THREE DIMENSIONAL;

HEIGHT PROFILE; LONG TRACE PROFILES; SLOPE MEASURING INSTRUMENTS; SYNCHROTRON BEAMLINE; TOROIDAL MIRROR;

SURFACE MEASUREMENT;

EID: 0029244963     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1145744     Document Type: Article

References (8)

1. Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler