Optical metrology facility at the ESRF

Review of Scientific Instruments

Volumn 66, Issue 2, 1995, Pages 2232-2234

  Susini, J ^a   Baker, R ^a   Vivo, A ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; FITS AND TOLERANCES; HELIUM NEON LASERS; HETERODYNING; INTERFEROMETRY; MIRRORS; QUALITY CONTROL; ROUGHNESS MEASUREMENT; SENSORS; THERMODYNAMIC STABILITY;

FRINGE PATTERN; METROLOGY LABORATORY; MICROROUGHNESS; OPTICAL QUALITY; SHACK HARTMANN SENSOR; SLOPE ERROR; X RAY MIRRORS; X RAY OPTICS;

LABORATORIES;

EID: 0029244619     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146506     Document Type: Article

References (12)