Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1164, Issue , 1989, Pages 203-211

  Takacs, Peter Z ^a   Furenlid, Karen ^a   DeBiasse, Robert A ^a   Church, Eugene L ^b  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b US Army ARDEC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; FREQUENCY DOMAIN ANALYSIS; SPECTRAL DENSITY; SURFACE PROPERTIES; SURFACE ROUGHNESS;

GRAZING INCIDENCE; INCIDENCE ANGLES; RADIUS OF CURVATURE; SPATIAL FREQUENCY; SPATIAL FREQUENCY DOMAINS; SURFACE PROFILES; SURFACE PROFILING; TOPOGRAPHY MEASUREMENT;

TOPOGRAPHY;

EID: 84957492390     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.962824     Document Type: Conference Paper

References (17)

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