Substrate temperature dependence of the photoluminescence efficiency of co-sputtered Si/SiO2 layers

Journal of Luminescence

Volumn 80, Issue 1-4, 1998, Pages 241-245

  Charvet, S ^a   Madelon, R ^a   Rizk, R ^a   Garrido, B ^b   Gonzalez Varona O ^b   Lopez M ^b   Perez Rodriguez A ^b   Morante, J R ^b  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Infrared absorption; Magnetron sputtering; Photoluminescence; Raman scattering; Si SiO2 layer; Silicon nanograin; X ray photoelectron spectroscopy

Indexed keywords

EID: 0001409896     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-2313(98)00105-7     Document Type: Article

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