Comparative study of implanted and sputtered systems of Si nanograins embedded in SiO2

Materials Research Society Symposium - Proceedings

Volumn 486, Issue , 1998, Pages 225-230

  Charvet, S ^a   Madelon, R ^a   Rizk, R ^a   Garrido, B ^a   Perez Rodriguez, A ^a   Lopez, M ^a   Gonzalez Varona, O ^a   Morante, J R ^a  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED SPECTROSCOPY; ION IMPLANTATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICA;

SILICON NANOCRYSTALS;

SEMICONDUCTING SILICON;

EID: 0031628926     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)