A bellows-shape electrostatic microactuator

Sensors and Actuators, A: Physical

Volumn 72, Issue 3, 1999, Pages 269-276

  Minami, K ^a   Morishita, H ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Bellows shape; Electrostatic microactuator; Excimer laser ablation; Parylene

Indexed keywords

AROMATIC POLYMERS; DEPOSITION; ELECTRODES; ELECTROSTATIC DEVICES; EXCIMER LASERS; GOLD; LASER ABLATION; METALLIC FILMS; PLASTIC FILMS; POLYIMIDES;

ELECTROSTATIC MICROACTUATORS; PARYLENE;

MICROACTUATORS;

EID: 0033079914     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00213-1     Document Type: Article

References (5)

1. W.C. Tang et al., Sensors and Actuators 20 (1/2) (1989) 25-32.
2. S.M. Bobbio et al., Proc. of MEMS' 93 (1993) 149-155.
3. K. Minami, S. Kawamura, M. Esashi, J. Microelectromechanical Systems 2 (3) (1993) 121-127.
4. M. Otsu, H. Shirahata, K. Minami, M. Esashi, Technical digest of the 13th Sensor Sympo., (1995) 33-36
5. M. Yamaguchi, S. Kawamura, K. Minami, M. Esashi, J. Micromech. Microeng. 3 (1993) 90-95.