ICP diagnostics with magnetic probes

Journal De Physique. IV : JP

Volumn 8, Issue 7, 1998, Pages

  Godyak, V A ^a   Piejak, R B ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; MAGNETIC FIELDS; PLASMA DENSITY; PLASMA PROBES; PLASMAS;

INDUCTIVELY COUPLED PLASMAS; MAGNETIC PROBES;

PLASMA DIAGNOSTICS;

EID: 7044233950     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1998720     Document Type: Article

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