The influence of SiNx:H film properties on the electrical characteristics of metal-insulator-semiconductor devices

Semiconductor Science and Technology

Volumn 12, Issue 12, 1997, Pages 1650-1653

  Garcia, S ^a   Martil I ^a   Gonzalez Diaz, G ^a   Fernandez, M ^b  

^a UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001227741     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/12/12/018     Document Type: Article

References (16)

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