Properties of a-SiNx.: H films deposited at room temperature by the electron cyclotron resonance plasma method

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

Volumn 73, Issue 3, 1996, Pages 487-502

  Garcia, S ^a   Martin, J M ^a   Fernandez, M ^b   Martil, I ^a   Gonzalez Diaz, G ^a  

^a UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002276843     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/13642819608239130     Document Type: Article

References (40)

1. Barbour, J. C., Stein, H. J., Popov, O. A., Yoder, M., and Outten, C. A., 1991, J. vac. Sci. Technol. A, 9, 480.
2. Broudreau, M., Boumerzoug, M., Mascher, P., and Jessop, P. E., 1993, Appl. Phys. Lett., 63, 3014.
3. Budhani, R. C., Prakash, S., Doerr, H. J., and Bunshah, R. F., 1987, J. vac. Sci. Technol. A, 5, 1644.
4. Claasen, W. A., Pol, H. A. J. Th. v. d., Goemans, A. H., and Kuiper, A. E. T., 1986, J. electrochem. Soc., 133, 1458.
5. Cross, Y., Rostaing, J. C., Peisner, J., Leveque, G., and Ance, C., 1987, J. appl. Phys., 62, 4538.
6. Davis, E. A., Piggins, N., and Bayliss, S. C., 1987, J. Phys., C, 20, 4415.
7. Flemish, J. R., and Pfeffer, R. L., 1993, J. appl. Phys., 74, 3277.
8. Garcia, S., Martin, J. M., Martil, I., and Gonzalez-Diaz, G., 1994, Vacuum, 45, 1027.
9. Garcia, S., Martin, J. M., Fernandez, M., Martil, I., and Gonzalez-Diaz, G., 1995a, J. vac. Sci. Technol. A, 13, 826.
10. Garcia, S., Martin, J. M., Martil, I., Fernandez, M., Iborra, E., and Gonzalez-Diaz, G., 1995b, non-crystalline Solids, 187, 329.
11. Ghandhi, S. K., 1993, VLSI Fabrication Principles, 2nd edition (New York: Wiley), Chap. 8. Handbook of Auger Electron Spectroscopy, 1976, 2nd edition (Eden Prairie, MN: Physical Electronics Industries).
12. Hasegawa, S., Amano, Y., Inokuma, T., and Kurata, Y., 1992, J. appl. Phys., 72, 5676.
13. Hasegawa, S., Anbutsu, H., and Kurata, Y., 1989, Phil. Mag. B, 59, 365.
14. Hasegawa, S., Matsuda, M., and Kurata, Y., 1990, Appl. Phys. Lett., 57, 2211.
15. Hasegawa, S., Matuura, M., Anbutu, H., and Kurata, Y., 1987, Phil. Mag. B, 56, 633.
16. Hasegawa, S., Matuura, M., and Kurata, Y., 1986, Appl. Phys. Lett., 49, 1272.
17. Hattangady, S. V., Fountain, G. G., Rudderm, R. A., and Markunas, R. J., 1989, J. vac. Sci. Technol. A, 7, 570.
18. Hernandez-Rojas, J. L., Lucia, M. L., Martil, I., Gonzalez-Diaz, G., Santamaria, J., and Sanchez Quesada, F., 1992, Appl. Optics, 31, 1606.
19. Hirao, T., Setsune, K., Kitagawa, M., Kamada, T., Wasa, K., and Izumi, T., 1987, Jap. J. appl. Phys., 26, 2015.
20. Kanicki, J., and Warren, W. L., 1993, J. non-crystalline Solids, 164-166, 1055.
21. Knolle, W. R., and Osenbach, J. W., 1985, J. appl. Phys., 58, 1248.
22. Knolle, W. R., Osenbach, J. W., and Elia, A., 1988, J. electrochem. Soc., 135, 1211.
23. Kotecki, D. E., and Chapple-Sokol, J. D., 1995, J. appl. Phys., 77, 1284.
24. Lanford, W. A., and Rand, M. J., 1978, J. appl. Phys., 49, 2473.
25. Lowe, A. J., Powell, M. J., and Elliott, S. R., 1986, J. appl. Phys., 59, 1251.
26. Lucovsky, G., Richard, P. D., Tsu, D. V., Lin, S. Y., and Markunas, R. J., 1986, J. vac. Sci. Technol. A, 4, 681.
27. Manabe, Y., and Mitsuyu, T., 1989, J. appl. Phys., 66, 2475.
28. Nguyen, S. V., and Albaugh, K., 1989, J. electrochem. Soc., 136, 2835.
29. Piggins, N., Davis, E. A., and Bayliss, S. C., 1987, J. non-crystalline Solids, 97&98, 1047.
30. Powell, M. J., Easton, B. C., and Hill, O. F., 1981, Appl. Phys. Lett., 38, 794.
31. Richard, P. D., Markunas, R. J., Lucovsky, G., Fountain, G. G., Mansour, A. N., and Tsu, D. V., 1985, J. vac. Sci. Technol. A, 3, 867.
32. Robertson, J., 1991, Phil. Mag. B, 63, 47.
33. Robertson, J., 1994, Phil. Mag. B, 69, 307.
34. Rocheleau, R. E., Zhang, Z., Niles, D. W., and Mason, A., 1992, J. appl. Phys., 72, 282.
35. Stewart, A. D., and Jones, D. I., 1988, Phil. Mag., B, 57, 431.
36. Sze, F. C., and Asmussen, J., 1993, J. vac. Sci. Technol. A, 11, 1289.
37. Theil, J. A., Hattangady, S. V., and Lucovsky, G., 1992, J. vac. Sci. Technol. A, 10, 719.
38. Tsu, D. V., Lucovsky, G., and Mantini, M. J., 1986, Phys. Rev. B, 33, 7069.
39. Tsu, D. V., Lucovsky, G., Mantini, M. J., and Chao, S. S., 1987, J. vac. Sci. Technol. A, 5, 1998.
40. Wemple, S. H., 1973, Phys. Rev. B, 7, 3767.