Recrystallization and electrical properties of MeV P implanted 6H-SiC

Journal of Applied Physics

Volumn 87, Issue 5, 2000, Pages 2655-2657

  Harada, Shinsuke ^a   Motooka, Teruaki ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001225499     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372234     Document Type: Article

References (16)

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