Metal-oxide-semiconductor capacitors formed by oxidation of polycrystalline silicon on SiC

Applied Physics Letters

Volumn 70, Issue 17, 1997, Pages 2280-2281

  Tan, J ^a   Das, M K ^a   Cooper Jr , J A ^a   Melloch, M R ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001143273     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119262     Document Type: Article

References (25)

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