Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2625-2631

  Kang, Dae Hwan ^a   Ha, Seung Chul ^a   Kim, Ki Bum ^a   Min, Seok Hong ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032358412     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581392     Document Type: Review

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