In situ analysis of Si(100) surface damage induced by low-energy rare-gas ion bombardment using x-ray photoelectron spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 820-824

  Ishii, Masahiko ^a   Hirose, Yoshiharu ^a   Sato, Toshikazu ^a   Ohwaki, Takeshi ^a   Taga, Yasunori ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844253177     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580714     Document Type: Article

References (21)

1. H. Winters and J. Coburn, Surf. Sci. Rep. 14, 161 (1992).
2. See, for example, L. C. Feldman and J. W. Mayer, Fundamentals of Surface and Thin Film Analysis (North-Holland, New York, 1986).
3. A. H. Al-Bayati, K. G. Orrman-Rossiter, R. Baclheka, and D. G. Armour, Surf. Sci. 237, 213 (1990).
4. K. Sumitomo, K. Tanaka, I. Katayama, F. Shoji, and K. Oura, Surf. Sci. 242, 90 (1991).
5. M. V. R. Murty and H. A. Atwater, Phys. Rev. B 45, 1507 (1992).
6. H. J. W. Zandvliet, H. B. Elswijk, E. J. van Loemen, and I. S. T. Tsong, Phys. Rev. B 46, 7581 (1992).
7. P. Bedrossian, Surf. Sci. 301, 223 (1994).
8. L. J. Huang, W. M. Lau, H. T. Tang, W. N. Lennard, I. V. Mitchell, P. J. Schultz, and M. Kasrai, Phys. Rev. B 50, 18 453 (1994).
9. Z. H. Lu, D. F. Mitchell, and M. J. Graham, Appl. Phys. Lett. 65, 552 (1994).
10. B. S. Swartzentruber, C. M. Matzke, D. L. Kendall, and J. E. Houston, Surf. Sci. 329, 83 (1995).
11. H. Iwakuro, T. Inoue, and T. Kuroda, Jpn. J. Appl. Phys. 30, L255 (1991).
12. M. Delfino, S. Salimian, and D. Hodul, J. Appl. Phys. 70, 1712 (1991).
13. W. Kern, in Handbook of Semiconductor Wafer Cleaning Technology edited by W. Kern (Noyes, Park Ridge, NJ, 1993).
14. Z. H. Lu and A. Yelon, Phys. Rev. B 41, 3284 (1990).
15. M. P. Seah, in: Practical Surface Analysis, edited by D. Briggs and M. P. Seah (Wiley, Chichester, 1990).
16. M. F. Hochella, Jr. and A. H. Carirn, Surf. Sci. 197, L260 (1988).
17. J. H. Ziegler and J. P. Biersack, The Stopping and Range of Ions in Solids (Pergamon, New York, 1975).
18. F. F. Morehead, Jr. and B. L. Crowder, Radat. Effects 6, 27 (1970).
19. J. P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
20. Y. Kido and H. Nakano, Surf. Sci. 239, 254 (1990).
21. N. Laegreid and G. K. Wehner, J. Appl. Phys. 32, 365 (1961).