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Journal of Photopolymer Science and Technology

Volumn 11, Issue 4, 1998, Pages 613-618

Study of high photo-speed top surface imaging process using chemically amplified resist

(8) Mori, Shigeyasu a,b Matsuzawa, Nobuyuki a Kaimoto, Yuko a Endo, Masayuki a Matsuo, Takahiro a Morisawa, Taku a Kuhara, Koichi a Sasago, Masaru a

a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET (Japan)

b SHARP CORPORATION (Japan)

Author keywords

Arf lithography; Chemically amplified resist; Line edge roughness; Photo speed; Process margin; Silylation

Indexed keywords

EID: 0000925357 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.11.613 Document Type: Article

Times cited : (5)

References (22)

1
- 84886447968
- S. Mori, T. Morisawa, N. Matsuzawa, Y. Kaimoto.M. Endo, T. Matsuo, M. Takahashi, T. Naito, Y. Naruse, S. Kishimura, S. Takechi, A. Yamaguchi, M. Uematsu, T. Onodera, K. Nakazawa, K. Kamon, T. Tatsumi, S. Morishita, K. Kuhara, T. Ohfuji, T. Ogawa, H. Ohtsuka, M. Inoue, M. Sasago, IEDM Tech. Dig. (1997) 933
- (1997) IEDM Tech. Dig. , pp. 933
- Mori, S.¹ Morisawa, T.² Matsuzawa, N.³ Kaimoto, Y.⁴ Endo, M.⁵ Matsuo, T.⁶ Takahashi, M.⁷ Naito, T.⁸ Naruse, Y.⁹ Kishimura, S.¹⁰ Takechi, S.¹¹ Yamaguchi, A.¹² Uematsu, M.¹³ Onodera, T.¹⁴ Nakazawa, K.¹⁵ Kamon, K.¹⁶ Tatsumi, T.¹⁷ Morishita, S.¹⁸ Kuhara, K.¹⁹ Ohfuji, T.²⁰ more..

2
- 0001614580
- T. Ohfuji, T. Ogawa, K. Kuhara, M. Sasago, J. Vac. Sci. Technol. B14,(1996) 4203
- (1996) J. Vac. Sci. Technol. , vol.B14 , pp. 4203
- Ohfuji, T.¹ Ogawa, T.² Kuhara, K.³ Sasago, M.⁴

3
- 0001403006
- S. Takechi, Y. Kaimoto, K. Nozaki, N. Abe, J. Photopolym. Sci. Technol. 5, (1992) 439
- (1992) J. Photopolym. Sci. Technol. , vol.5 , pp. 439
- Takechi, S.¹ Kaimoto, Y.² Nozaki, K.³ Abe, N.⁴

4
- 0029233594
- M. Takahashi, S. Takechi, Y. Kaimoto, I. Hanyu, N. Abe, K. Nozaki, SPIE Proc. 2438, (1995) 422
- (1995) SPIE Proc. , vol.2438 , pp. 422
- Takahashi, M.¹ Takechi, S.² Kaimoto, Y.³ Hanyu, I.⁴ Abe, N.⁵ Nozaki, K.⁶

5
- 0029727392
- T. Ohfuji, K. Maeda, K. Nakano, E. Hasegawa, SPIE Proc. 2724, (1996) 386
- (1996) SPIE Proc. , vol.2724 , pp. 386
- Ohfuji, T.¹ Maeda, K.² Nakano, K.³ Hasegawa, E.⁴

6
- 0029727827
- K. Maeda, K. Nakano, T. Ohfuji, E. Hasegawa, SPIE Proc. 2724, (1996) 377
- (1996) SPIE Proc. , vol.2724 , pp. 377
- Maeda, K.¹ Nakano, K.² Ohfuji, T.³ Hasegawa, E.⁴

7
- 0029748674
- R. R. Kunz, S. C. Palmateer, A. R. Forte, R. D. Allen, G. M. Wallraff, R. A. DiPietro, D. C. Hofer, SPIE Proc. 2724, (1996) 365
- (1996) SPIE Proc. , vol.2724 , pp. 365
- Kunz, R.R.¹ Palmateer, S.C.² Forte, A.R.³ Allen, R.D.⁴ Wallraff, G.M.⁵ DiPietro, R.A.⁶ Hofer, D.C.⁷

8
- 0029215566
- S. C. Palmateer, R. R. Kunz, M. W. Horn, A. R. Forte, M. Rothschild, SPIE Proc. 2438, (1995) 455
- (1995) SPIE Proc. , vol.2438 , pp. 455
- Palmateer, S.C.¹ Kunz, R.R.² Horn, M.W.³ Forte, A.R.⁴ Rothschild, M.⁵

9
- 0029214360
- K. Maeda, T. Ohfuji, N. Aizaki, E. Hasegawa, SPIE Proc. 2438, (1995) 465
- (1995) SPIE Proc. , vol.2438 , pp. 465
- Maeda, K.¹ Ohfuji, T.² Aizaki, N.³ Hasegawa, E.⁴

10
- 0029765947
- U. Schaedeli, E. Tinguely, A. J. Blakeney, P. Falcigno, R. R. Kunz, SPIE Proc. 2724 (1996) 344
- (1996) SPIE Proc. , vol.2724 , pp. 344
- Schaedeli, U.¹ Tinguely, E.² Blakeney, A.J.³ Falcigno, P.⁴ Kunz, R.R.⁵

11
- 0029774842
- J. Hutchinson, Y. melaku, W. Nguyen, S. Das, SPIE Proc. 2724 (1996) 399
- (1996) SPIE Proc. , vol.2724 , pp. 399
- Hutchinson, J.¹ Melaku, Y.² Nguyen, W.³ Das, S.⁴

12
- 0027001313
- D. W. Johnson, M. A. Hartney,J/?/2. J. Appl. Phys. 31(1992) 4321
- (1992) J. Appl. Phys. , vol.31 , pp. 4321
- Johnson, D.W.¹ Hartney, M.A.²

13
- 0000771906
- Ki-Ho Baik, L. Van den hove, B. Roland, J. Vac. Sci. Technol. B9 (1991) 3399
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 3399
- Baik, K.-H.¹ Van Den Hove, L.² Roland, B.³

14
- 0010397637
- M. Irmscher, B. Hofflinger, R. Springer, C. Stauffer.W.Peterson.y. PhotoPolym. Sci. Technol. 9(1996)497
- (1996) Y. PhotoPolym. Sci. Technol. , vol.9 , pp. 497
- Irmscher, M.¹ Hofflinger, B.² Springer, R.³ Stauffer, C.⁴ Peterson, W.⁵

15
- 0000243166
- T. Matsuo, M. Endo, J. PhotoPolym. Sci. Technol. 9 (1996) 523
- (1996) J. PhotoPolym. Sci. Technol. , vol.9 , pp. 523
- Matsuo, T.¹ Endo, M.²

16
- 11744278505
- S. Mori, N.Matsuzawa, T. Morisawa, Y. Kaimoto, M. Endo, T. Matsuo, K. Kuhara, M. Sasago, J. Photopolym. Sci Technol. 10 (1997) 603
- (1997) J. Photopolym. Sci Technol. , vol.10 , pp. 603
- Mori, S.¹ Matsuzawa, N.² Morisawa, T.³ Kaimoto, Y.⁴ Endo, M.⁵ Matsuo, T.⁶ Kuhara, K.⁷ Sasago, M.⁸

17
- 33745576035
- S. Mori, K. Kuhara, T. Ohfuji, M. Sasago, SPIE Proc. 3947 (1997) 146
- (1997) SPIE Proc. , vol.3947 , pp. 146
- Mori, S.¹ Kuhara, K.² Ohfuji, T.³ Sasago, M.⁴

18
- 84909887936
- M. deGrandpre, K. Graziano, S. D. Thompson, SPIE Proc. 923(1988) 158
- (1988) SPIE Proc. , vol.923 , pp. 158
- DeGrandpre, M.¹ Graziano, K.² Thompson, S.D.³

19
- 24044544925
- J.W.Thackeray, G. W.Ursula,E. K. Pavelchek, D. Canistro, SPIE Proc. 1086 (1989) 34
- (1989) SPIE Proc. , vol.1086 , pp. 34
- Thackeray, J.W.¹ Ursula, G.W.² Pavelchek, E.K.³ Canistro, D.⁴

20
- 85075367071
- S. Das, J. Thackeray, M. Endo, J. Längsten, H.Gaw, SPIE Proc. 1262 (1990) 60
- (1990) SPIE Proc. , vol.1262 , pp. 60
- Das, S.¹ Thackeray, J.² Endo, M.³ Längsten, J.⁴ Gaw, H.⁵

21
- 0026467377
- M. A. Hartney, J. W. Thackeray, SPIE Proc. 1672(1992) 486
- (1992) SPIE Proc. , vol.1672 , pp. 486
- Hartney, M.A.¹ Thackeray, J.W.²

22
- 33745527417
- in press
- J. Hutchinson, V. Rao, G. Zhang, A. Pawloski, C. Fonseca, S. Holl, S. Das, SPIE Proc. 3333 (1998), in press.
- (1998) SPIE Proc. , vol.3333
- Hutchinson, J.¹ Rao, V.² Zhang, G.³ Pawloski, A.⁴ Fonseca, C.⁵ Holl, S.⁶ Das, S.⁷

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