Temperature-dependent thermal conductivity of single-crystal silicon layers in SOI substrates

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 83-91

  Asheghi, M ^a   Touzelbaev, M N ^a   Goodson, K E ^a   Leung, Y K ^a   Wong, S S ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS;

BOND AND ETCH BACK TECHNOLOGY; PHONON TRANSPORT ANALYSIS;

TRANSISTORS;

EID: 0030368465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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